Time-resolved tuned diode laser absorption spectroscopy of pulsed plasma

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00439672" target="_blank" >RIV/68378271:_____/14:00439672 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1088/1742-6596/511/1/012088" target="_blank" >http://dx.doi.org/10.1088/1742-6596/511/1/012088</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1742-6596/511/1/012088" target="_blank" >10.1088/1742-6596/511/1/012088</a>

Result language
angličtina
Original language name
Time-resolved tuned diode laser absorption spectroscopy of pulsed plasma
Original language description
A novel method for time-resolved tuned diode laser absorption spectroscopy has been developed. In this paper, we describe in detail developed electronic module that controls time-resolution of laser absorption spectroscopy system. The TTL signal triggering plasma pulse is used for generation of two signals: the first one triggers the fine tuning of laser wavelength and second one controls time-defined signal sampling from absorption detector. The described method and electronic system enable us to investigate temporal evolution of sputtered particles in technological low-temperature plasma systems. The pulsed DC planar magnetron sputtering system has been used to verify this method. The 2 in diameter titanium target was sputtered in pure argon atmosphere. The working pressure was held at 2 Pa. All the experiments were carried out for pulse ON time fixed at 100 ?s.
Czech name
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Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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