System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F17%3A00473840" target="_blank" >RIV/68378271:_____/17:00473840 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1063/1.4975175" target="_blank" >http://dx.doi.org/10.1063/1.4975175</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1063/1.4975175" target="_blank" >10.1063/1.4975175</a>

Result language

angličtina

Original language name

System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron sputtering

Original language description

This paper deals with the development and construction of an apparatus for time-resolved tunable diode laser absorption spectroscopy (LAS) for the diagnostics of pulsed plasma. A detailed description of the extension of a progressive method of laser absorption spectroscopy in continuous regime to a direct triggering method of the time-resolved laser absorption spectroscopy (TR-LAS) is presented. The main advantage of the developed method is its capability to measure the time evolution of the whole absorption profile with a preset time resolution, which can be less than 1 mu s. Therefore, the presented method of repetitive sampling applied on LAS in plasma processes is capable of simultaneous measurement of the density and kinetic temperature of selected particles. Its appropriate applications are to periodical processes in technological plasma, namely pulsed plasma discharges. The developed method of TR-LAS was applied to measurements of the temporal evolution of density and kinetic temperature of argon metastable species during high-power impulse magnetron sputtering of titanium and titanium dioxide thin films. .

Czech name

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Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2017

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Review of Scientific Instruments

ISSN

0034-6748

e-ISSN

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Volume of the periodical

88

Issue of the periodical within the volume

2

Country of publishing house

US - UNITED STATES

Number of pages

8

Pages from-to

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UT code for WoS article

000395902700005

EID of the result in the Scopus database

2-s2.0-85012005007