Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00391436" target="_blank" >RIV/68378271:_____/13:00391436 - isvavai.cz</a>

Result on the web

<a href="http://iopscience.iop.org/0963-0252/22/1/015002/" target="_blank" >http://iopscience.iop.org/0963-0252/22/1/015002/</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/0963-0252/22/1/015002" target="_blank" >10.1088/0963-0252/22/1/015002</a>

Result language

angličtina

Original language name

Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges

Original language description

Time-resolved investigations of excited argon atom density and temperature and ground-state titanium atom density during high-power impulse magnetron sputtering (HiPIMS, repetition frequency 100 Hz) and direct current pulsed magnetron (repetition frequency 2.5 kHz) discharges (PMDs) in argon employing a titanium target were performed. Atom density and temperature were measured with the help of tunable diode laser absorption spectroscopy. Excited argon atoms form during the discharge pulse and again by three-body electron ion recombination in the afterglow. Similarly, the temperature of excited (metastable) argon atoms rises during the plasma on phase and again during the afterglow. The observed temporal evolution of the temperature is faster than expected from thermal conductivity considerations. The time dependence of titanium atoms can be explained by recombination and diffusion.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BH - Optics, masers and lasers

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Plasma Sources Science & Technology

ISSN

0963-0252

e-ISSN

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Volume of the periodical

22

Issue of the periodical within the volume

1

Country of publishing house

GB - UNITED KINGDOM

Number of pages

10

Pages from-to

1-10

UT code for WoS article

000314966300007

EID of the result in the Scopus database

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