Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00439961" target="_blank" >RIV/68378271:_____/14:00439961 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1109/PVSC.2014.6925239" target="_blank" >http://dx.doi.org/10.1109/PVSC.2014.6925239</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/PVSC.2014.6925239" target="_blank" >10.1109/PVSC.2014.6925239</a>
Alternative languages
Result language
angličtina
Original language name
Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films
Original language description
CuIn1-xGaxSe2 (CIGS) thin films with x = 0, 0.28 and 1 were prepared by the sputtering of Cu, In and Ga in HiPIMS (High Power Impulse Magnetron Sputtering) or DC magnetron and subsequently selenized in an Ar+Se atmosphere. Optical emission spectroscopy (OES) was used to monitor differences in HiPIMS and DC plasma during sputtering of metallic precursors. Thin film characteristics were measured using X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy, energy-dispersive X-rayspectroscopy (EDX) and other techniques.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/LH12045" target="_blank" >LH12045: Fabrication and analysis of the properties of Cu(In,X)Se2 thin-film solar cells prepared from plasma-sputtered and spray-deposited precursors</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
IEEE Photovoltaic Specialist Conference (PVSC 2014) /40./
ISBN
9781479943982
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
1666-1669
Publisher name
IEEE
Place of publication
New York
Event location
Denver
Event date
Jun 8, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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