Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00441167" target="_blank" >RIV/68378271:_____/14:00441167 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1063/1.4893611" target="_blank" >http://dx.doi.org/10.1063/1.4893611</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4893611" target="_blank" >10.1063/1.4893611</a>

Result language
angličtina
Original language name
Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source
Original language description
We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUVsource diameter as low as 18 lm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitablefor high brightness and high repetition rate metrology applications.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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