Deposition of functional coatings in the microwave waveguide by the magnetrons sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00450986" target="_blank" >RIV/68378271:_____/14:00450986 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Deposition of functional coatings in the microwave waveguide by the magnetrons sputtering
Original language description
The quality of microwave waveguide components is determined by the electrical properties of the thin sub-surface layer of the waveguide inner walls. In this work we present a deposition apparatus for coating of inner walls of the waveguide components. This apparatus uses principles of magnetron sputtering method. Nevertheless, the design ofthe apparatus has been significantly modified because of low transverse dimensions and significant length of the waveguide. For experiments, we used waveguides for band 8.2 to 12.4 GHz with cross-section dimensions 10.2 x 22.9 mm 2 and length 250 mm. The inner walls of the waveguide were coated by 1 um of silver layer. The thickness uniformity of the coating was controlled by continuous movement of the magnetic fieldalong the waveguide. The deposition rate was estimated from the coating thickness on the ?witness silicon substrate placed inside the waveguide during the sputtering process.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
<a href="/en/project/TA03010490" target="_blank" >TA03010490: Precision multifunctional coatings in vacuum and microwaves devices.</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů