Synthesis of Si-NWs by PECVD using Sn as catalyst on TCO thin film for optoelectronic devicies

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00511234" target="_blank" >RIV/68378271:_____/14:00511234 - isvavai.cz</a>

Result on the web

<a href="http://hdl.handle.net/11104/0301556" target="_blank" >http://hdl.handle.net/11104/0301556</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/2043-6262/5/4/045011" target="_blank" >10.1088/2043-6262/5/4/045011</a>

Result language

angličtina

Original language name

Synthesis of Si-NWs by PECVD using Sn as catalyst on TCO thin film for optoelectronic devicies

Original language description

In this paper we focus on silicon nanowires (Si-NWs) which were fabricated on transparent conductive substrates (TCO) by plasma-enhanced chemical vapor deposition (PECVD) method using Sn as stimulated catalyst metal. TCO which we used are ZnO fabricated by direct current (dc) sputtering. Property of ZnO thin film was investigated by x-ray diffraction (XRD), volt-ohm-miliampere (VOM) meter, and Stylus method. In order to grow Si-NWs using PECVD we need to use Sn as catalyst to synthesize Si-NWs. Sn nanoparticles were fabricated by high vacuum evaporation system with SenVac thin film controller. Size and density of nanoparticles (NPs) were investigated by scanning electron microscope (SEM). The influence of the thickness and forming Sn NPs was studied. In particular, the factors affecting the formation of Si-NWs such as temperature and rate of gas were examined. Si-NWs' properties were investigated by SEM, Raman spectroscopy and energy dispersive x-ray (EDX) spectrocopyn

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Advances in Natural Sciences-Nanoscience and Nanotechnology

ISSN

2043-6254

e-ISSN

—

Volume of the periodical

5

Issue of the periodical within the volume

4

Country of publishing house

GB - UNITED KINGDOM

Number of pages

8

Pages from-to

1-8

UT code for WoS article

000365744600013

EID of the result in the Scopus database

2-s2.0-84916919386