A modified Katsumata probe - ion sensitive probe for measurement in non-magnetized plasmas
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F15%3A00449224" target="_blank" >RIV/68378271:_____/15:00449224 - isvavai.cz</a>
Alternative codes found
RIV/61389021:_____/15:00449224
Result on the web
<a href="http://dx.doi.org/10.1063/1.4927169" target="_blank" >http://dx.doi.org/10.1063/1.4927169</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4927169" target="_blank" >10.1063/1.4927169</a>
Alternative languages
Result language
angličtina
Original language name
A modified Katsumata probe - ion sensitive probe for measurement in non-magnetized plasmas
Original language description
A modified Katsumata probe has been developed for measurement of ion velocity distribution function (IVDF) in technological non-magnetized plasmas. A comparative study regarding IVDF measurement in a high power impulse magnetron sputtering system operating in pure argon atmosphere by means of developed modified Katsumata probe and commercially available gridded retarding field analyzer (RFA) has been carried out. A time-resolved measurement of IVDF for two different pressures whilst other plasma conditions have been kept unchanged has revealed that the main advantage of the modified Katsumata probe compared to the RFA consists in significantly smaller angular aperture of entrance orifice of modified Katsumata probe being approximately 15 in comparisonwith a commercial RFA having angular aperture more than 160. It leads in much better velocity resolution in measured IVDF since the transversal part of velocity vector is much more suppressed compared to RFA.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/LH12043" target="_blank" >LH12043: A Study of thin films systems based on Iron Pyrite (FeS2) for Photonic Applications.</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Review of Scientific Instruments
ISSN
0034-6748
e-ISSN
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Volume of the periodical
86
Issue of the periodical within the volume
7
Country of publishing house
US - UNITED STATES
Number of pages
7
Pages from-to
"073510-1"-"073510-7"
UT code for WoS article
000358934400048
EID of the result in the Scopus database
2-s2.0-84937501327