Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00421856" target="_blank" >RIV/68378271:_____/13:00421856 - isvavai.cz</a>
Result on the web
<a href="http://www.sciencedirect.com/science/article/pii/S0040609013011127" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0040609013011127</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2013.06.061" target="_blank" >10.1016/j.tsf.2013.06.061</a>
Alternative languages
Result language
angličtina
Original language name
Angle-resolved investigation of ion dynamics in high power impulse magnetron sputtering deposition system
Original language description
The high power impulse magnetron sputtering deposition system (HiPIMS) equipped with 5 cm in diameter titanium target has been investigated by means of time-resolved modified Katsumata probe. The probe allows for determination of the ion velocity distribution function. Compact construction of modified Katsumata probe allows us to place the probe in an arbitrary position with respect to planar magnetron. The present construction of modified Katsumata probe allows reaching the acceptance angle of about 15°. The ion velocity distribution function (IVDF) in forward direction is then directly proportional to the derivative of measured ion current with respect to the retarding potential. An angle-resolved study of HiPIMS system operating in the reactive atmosphere has been carried out. The effect of oxygen partial pressure on measured IVDF at different angles within the plasma pulse has been investigated.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/LD12002" target="_blank" >LD12002: Investigation of hybrid HiPIMS systems for deposition of nanostructured thin films</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Thin Solid Films
ISSN
0040-6090
e-ISSN
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Volume of the periodical
549
Issue of the periodical within the volume
DEC
Country of publishing house
CH - SWITZERLAND
Number of pages
7
Pages from-to
177-183
UT code for WoS article
000327537100033
EID of the result in the Scopus database
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