Simultaneous determination of the residual stress, elastic modulus, density and thickness of ultrathin film utilizing vibrating doubly clamped micro-/nanobeams

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F16%3A00462140" target="_blank" >RIV/68378271:_____/16:00462140 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1063/1.4947031" target="_blank" >http://dx.doi.org/10.1063/1.4947031</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1063/1.4947031" target="_blank" >10.1063/1.4947031</a>

Result language

angličtina

Original language name

Simultaneous determination of the residual stress, elastic modulus, density and thickness of ultrathin film utilizing vibrating doubly clamped micro-/nanobeams

Original language description

Measurement of ultrathin film thickness and its basic properties can be highly challenging and time consuming due to necessity of using several very sophisticated devices. Here, we report an easy accessible resonant based method capable to simultaneously determinate the residual stress, elastic modulus, density and thickness of ultrathin film coated on doubly clamped micro-/nanobeam. We show that a general dependency of the resonant frequencies on the axial load is also valid for in-plane vibrations, and the one depends only on the considered vibrational mode. As a result, we found that the film elastic modulus, density and thickness can be evaluated from two measured in-plane and out-plane fundamental resonant frequencies of micro-/nanobeam with and without film under different prestress forces.

Czech name

—

Czech description

—

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

—

Project

<a href="/en/project/GC15-13174J" target="_blank" >GC15-13174J: Micromechanical resonators with intentionally changeable physical and mechanical properties applicable in various biomaterials and physical sensors</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2016

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

AIP ADVANCES

ISSN

2158-3226

e-ISSN

—

Volume of the periodical

6

Issue of the periodical within the volume

4

Country of publishing house

US - UNITED STATES

Number of pages

8

Pages from-to

—

UT code for WoS article

000375845100005

EID of the result in the Scopus database

2-s2.0-84966425157