Active frequency tuning of the cantilever nanoresonator utilizing a phase transformation of NiTi thin film

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F17%3A00483366" target="_blank" >RIV/68378271:_____/17:00483366 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.21595/jve.2017.18887" target="_blank" >http://dx.doi.org/10.21595/jve.2017.18887</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.21595/jve.2017.18887" target="_blank" >10.21595/jve.2017.18887</a>

Result language

angličtina

Original language name

Active frequency tuning of the cantilever nanoresonator utilizing a phase transformation of NiTi thin film

Original language description

Due to their small sizes, compactness, low cost, high sensitivity, high resolution and extraordinary physical properties, nanoresonators have attracted a widespread attention from the scientific community. It is required that the nanoresonators can operate at desired but adjustable resonant frequencies. In this work, we present a novel active frequency tuning method utilizing a large change of the Young's modulus (more than 50 %) and generated interlayer stress (up a few hundred of MPa) during a phase transformation of NiTi thin film deposited on an elastic substrate. We show that this tuning mechanism can allow one to achieve the extraordinary high fundamental resonant frequency tunability (~30 %). The impact of NiTi film thickness and dimensions on the first three consecutive resonant frequencies of the cantilever nanobeam is examined.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

<a href="/en/project/GC15-13174J" target="_blank" >GC15-13174J: Micromechanical resonators with intentionally changeable physical and mechanical properties applicable in various biomaterials and physical sensors</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2017

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Journal of Vibroengineering

ISSN

1392-8716

e-ISSN

—

Volume of the periodical

19

Issue of the periodical within the volume

7

Country of publishing house

LT - LITHUANIA

Number of pages

9

Pages from-to

5161-5169

UT code for WoS article

000419833500025

EID of the result in the Scopus database

2-s2.0-85034783418