Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61388998%3A_____%2F20%3A00533159" target="_blank" >RIV/61388998:_____/20:00533159 - isvavai.cz</a>

Alternative codes found

RIV/68378271:_____/20:00533159 RIV/68407700:21110/20:00338917 RIV/68407700:21340/20:00338917

Result on the web

<a href="https://doi.org/10.1088/1361-665X/ab4e0c" target="_blank" >https://doi.org/10.1088/1361-665X/ab4e0c</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1088/1361-665X/ab4e0c" target="_blank" >10.1088/1361-665X/ab4e0c</a>

Result language

angličtina

Original language name

Effect of FIB milling on NiTi films and NiTi/Si micro-bridge sensor

Original language description

Resonance based mass sensors are able to sense tiny fractions of grams based on the resonant frequency shift of a resonator when the resonator is subjected to changes in attached mass or temperature. In our work, NiTi/Si micro-bridge with a design of tunable resonance based sensor was fabricated using Xe plasma FIB. Before fabricating the micro-bridge, an influence of various Xe FIB currents on the transformational behavior of NiTi films was tested. In the other part of the present study, the effect of temperature on the vibrating NiTi/Si micro-bridge was examined in a broad range of frequencies. It is suggested that the NiTi film can work as a frequency tuning element in resonance based mass sensors. The shift of the first resonant frequencies of NiTi/Si bilayer micro-bridge with the length, width, thickness and the NiTi/Si thickness ratio being 200 μm, 40 μm, 5.8 μm and 0.29, respectively, is up to 7 % with temperature ranging from 25°C to 100°C during heating up.n

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

20501 - Materials engineering

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2020

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Smart Materials and Structures

ISSN

0964-1726

e-ISSN

—

Volume of the periodical

29

Issue of the periodical within the volume

1

Country of publishing house

GB - UNITED KINGDOM

Number of pages

10

Pages from-to

1-10

UT code for WoS article

000499407300001

EID of the result in the Scopus database

2-s2.0-85081063030