Fabrication of 2D periodic structures patterned on 3D surfaces by laser lithography

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F17%3A00483207" target="_blank" >RIV/68378271:_____/17:00483207 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Fabrication of 2D periodic structures patterned on 3D surfaces by laser lithography

Original language description

We prepared structures on two different surfaces: GaP cones grown by MOVPE and polycrystalline diamond films were deposited on Si using MWCVD. For the photoresist deposition we used technique of standard spin-coating deposition and deposition from water level. Quality of prepared structures were examined by confocal laser microscope and SEM. GaP microcones grown by MOVPE were formed on substrate and were patterned by interference laser lithography. Different 2D structures were patterned in the GaP microcones surfaces. Similar technique was used for 2D structure fabrication on diamond . Uniformity of diamond surface strongly depended on the homogeneous photoresist layer deposition which was experimentally optimized using different photoresist deposition techniques. In the next process, the selective deposition of metal nanoparticles in the patterned surface is aimed. This should lead to uniformly distributed nanostructures on 3D surfaces for plasmonic or SERS applications.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

<a href="/en/project/7AMB17AT036" target="_blank" >7AMB17AT036: Plasmonic biosensors advanced by diamond nanostructures</a><br>

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2017

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Extended Abstract Book of international conference Progress in Applied Surface - SURFINT-SREN V

ISBN

978-80-2234411-1

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

82-83

Publisher name

Comenius University

Place of publication

Bratislava

Event location

Florence

Event date

Nov 20, 2017

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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