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Creation and behavior of radicals and ions in the Acetylene/Argon microwave ECR discharge

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F17%3A00485280" target="_blank" >RIV/68378271:_____/17:00485280 - isvavai.cz</a>

  • Alternative codes found

    RIV/60461373:22340/17:43913692

  • Result on the web

    <a href="http://dx.doi.org/10.1002/ppap.201700062" target="_blank" >http://dx.doi.org/10.1002/ppap.201700062</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1002/ppap.201700062" target="_blank" >10.1002/ppap.201700062</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Creation and behavior of radicals and ions in the Acetylene/Argon microwave ECR discharge

  • Original language description

    Formation and number of molecules, radicals, and ions in ECR acetylene/argon discharge is studied as functions of gas flow rate, supplied power, and partial pressure of acetylene. The spectra obtained by neutral mass spectrometry (NMS) exhibit the presence of atomic hydrogen and H2 molecules. The quantity of acetylene ions is rather high in the range of power up to 350 W, but it drops down with increasing power. At higher powers, the change to C2H+ ion takes place and its quantity grows with increasing power. The dependence of the number of C2+, C2H+, C2H2+ on the electron energy is judged by appearance potential mass spectrometry in the energy range 0–100 eV. The obtained findings are useful for the technology of industrial preparation of DLC thin films.n

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2017

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Plasma Processes and Polymers

  • ISSN

    1612-8850

  • e-ISSN

  • Volume of the periodical

    14

  • Issue of the periodical within the volume

    12

  • Country of publishing house

    DE - GERMANY

  • Number of pages

    9

  • Pages from-to

  • UT code for WoS article

    000417859300006

  • EID of the result in the Scopus database

    2-s2.0-85022327181