A detailed investigation of radicals and ions in ECR methane/argon microwave discharge
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F16%3A00466137" target="_blank" >RIV/68378271:_____/16:00466137 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1002/ppap.201500221" target="_blank" >http://dx.doi.org/10.1002/ppap.201500221</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/ppap.201500221" target="_blank" >10.1002/ppap.201500221</a>
Alternative languages
Result language
angličtina
Original language name
A detailed investigation of radicals and ions in ECR methane/argon microwave discharge
Original language description
In this work, we focus on study of the formation and behavior of molecules, radicals, and ions in ECR discharge in a mixture of argon and methane. Discharge properties are studied at various conditions; total gas flow (0–50 sccm), absorbed microwave power (0–900 W) and the partial pressure of methane (0–1.2 Pa). Neutral mass spectrometry does not reveal the presence of radical CH5 commonly described in literature. Spectra show the presence of atomic hydrogen H and especially H2 molecules. The number of CH4 + and CH3 + species shows that the amount of CH4 + in areas power up to 350 W is high, but with further increase of the power their amount decreases. With the increasing power the CH3 + ons are more intensively generated. The obtained data helps optimize process conditions for the fabrication of diamond and DLC thin films.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Plasma Processes and Polymers
ISSN
1612-8850
e-ISSN
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Volume of the periodical
13
Issue of the periodical within the volume
10
Country of publishing house
DE - GERMANY
Number of pages
11
Pages from-to
970-980
UT code for WoS article
000389205500003
EID of the result in the Scopus database
2-s2.0-84977127285