Cathode voltage and discharge current oscillations in HiPIMS
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F17%3A00486975" target="_blank" >RIV/68378271:_____/17:00486975 - isvavai.cz</a>
Alternative codes found
RIV/00216224:14310/17:00094725
Result on the web
<a href="http://dx.doi.org/10.1088/1361-6595/aa62ee" target="_blank" >http://dx.doi.org/10.1088/1361-6595/aa62ee</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/1361-6595/aa62ee" target="_blank" >10.1088/1361-6595/aa62ee</a>
Alternative languages
Result language
angličtina
Original language name
Cathode voltage and discharge current oscillations in HiPIMS
Original language description
This paper reports on the oscillations both on the cathode voltage and on the discharge current which emerged suddenly and simultaneously during a. high- power impulse magnetron sputtering pulse. Detailed. experiments identified the pressure and the discharge current ranges to detect these oscillations. The oscillations. originated. from the magnetized plasma and their frequency ranged from 225 kHz to 400 kHz depending on the experimental conditions. Simultaneous measurement of both oscillations and spokes was conducted to find mutual correlations. The oscillations always accompanied the spokes and no particular conditions to detect oscillations in the. absence of. spokes were found. The oscillations were not caused by the rotational motion of the spokes but. emerged when a. certain threshold amount of spokes was overreached.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Plasma Sources Science & Technology
ISSN
0963-0252
e-ISSN
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Volume of the periodical
26
Issue of the periodical within the volume
5
Country of publishing house
GB - UNITED KINGDOM
Number of pages
12
Pages from-to
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UT code for WoS article
000398394500002
EID of the result in the Scopus database
2-s2.0-85018343394