Measurement and modeling of plasma parameters in reactive high-power impulse magnetron sputtering of Ti in Ar/O2 mixtures

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F17%3A00486980" target="_blank" >RIV/68378271:_____/17:00486980 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1063/1.4977821" target="_blank" >http://dx.doi.org/10.1063/1.4977821</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4977821" target="_blank" >10.1063/1.4977821</a>

Result language
angličtina
Original language name
Measurement and modeling of plasma parameters in reactive high-power impulse magnetron sputtering of Ti in Ar/O2 mixtures
Original language description
A reactive high-power impulse magnetron sputtering (HiPIMS) process using a titanium target in a mixture of Ar/O2 has been investigated for different modes of operation including pure argon, metallic, transition, and compound mode. The trends and changes in the plasma density ne and the effective electron temperature Teff, have been measured by the time-resolved Langmuir probe technique. The same experimental process conditions have also been studied using a recently developed reactive ionization region model (R-IRM), making it possible to compare the acquired experimental results with the model results. It was found that trends in the plasma density and mean electron energy as measured by the Langmuir probe are in good agreement with the results obtained from the R-IRM model for different pulse discharge current densities.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
<a href="/en/project/GA15-00863S" target="_blank" >GA15-00863S: A study of impulse plasmatic systems for deposition of thin layers with applications in photonics</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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