Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F18%3A00496285" target="_blank" >RIV/68378271:_____/18:00496285 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Preparation of Ni-Mn-Ga Micropillars Using Focused Xe-ion Beam Milling for Magnetic Actuation on Microscale

Original language description

Magnetic shape memory alloys are promising candidates for actuation on microscale. We investigate the possibility of using focused Xe-ion (as an alternative to Ga-ion) beam milling (Xe-FIB) for microfabrication on Ni-Mn-Ga magnetic shape memory single crystals. We started with the most basic structures such as micropillars. Xe-FIB working conditions of 30 kV/100 nA results in large curtaining effect thus for micrometre sized structures a two-step milling procedure was used with the final polishing conditions of 30 kV/100 pA. Pillars down to 1 micrometre size were produced preparation of 10 x 10 micrometres square-base pillar for magnetomechanical testing is illustrated in individual steps. By the combination of mechanical testing and optical microscopy we demonstrate that the Xe-FIB milling does not significantly change the ability of martensite twin boundaries to propagate through the fabricated pillars.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

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OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

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Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings International Conference on New Actuators /16./

ISBN

978-3933339300

ISSN

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e-ISSN

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Number of pages

4

Pages from-to

1-642

Publisher name

VDE VERLAG

Place of publication

Bremen

Event location

Bremen

Event date

Jun 25, 2018

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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