Improved contactless method of IR reflectance under grazing incidence for measurement of doping profiles
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F18%3A00501967" target="_blank" >RIV/68378271:_____/18:00501967 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/18:00327155
Result on the web
<a href="http://dx.doi.org/10.4229/35thEUPVSEC20182018-2AO.5.3" target="_blank" >http://dx.doi.org/10.4229/35thEUPVSEC20182018-2AO.5.3</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.4229/35thEUPVSEC20182018-2AO.5.3" target="_blank" >10.4229/35thEUPVSEC20182018-2AO.5.3</a>
Alternative languages
Result language
angličtina
Original language name
Improved contactless method of IR reflectance under grazing incidence for measurement of doping profiles
Original language description
We have elaborated contactless method of measurement and evaluation of doping profiles in silicon polished wafers based on infrared reflectance under high angle of incidence. We have found higher angle of incidence increases sensitivity, however approaching Brewster angle increases also experimental error, therefore 65 angle has been chosen. Moreover, to increase reproducibility we divide the measured spectra by reference spectra taken on an undoped sample, and further we rescale the spectra to fixed value in the region of 4000 cm-1–7000 cm-1. To reduce number of evaluated parameter, the carrier profile in boron-doped samples was parametrized by 3 parameters and that in phosphorous-doped samples was parametrized by 4 parameters, using additional empirically determined assumption that the first part of the profile is a constant plateau and that the following two exponential tails are joined at a value of 3x10^19 cm-3.n
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of 35th European Photovoltaic Solar Energy Conference and Exhibition
ISBN
3-936338-50-7
ISSN
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e-ISSN
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Number of pages
3
Pages from-to
278-280
Publisher name
WIP
Place of publication
Brusel
Event location
Brusel
Event date
Sep 24, 2018
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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