Measurement of doping profiles by a contactless method of IR reflectance under grazing incidence
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F18%3A00492864" target="_blank" >RIV/68378271:_____/18:00492864 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21230/18:00322509 RIV/00216224:14310/18:00106359
Result on the web
<a href="http://dx.doi.org/10.1063/1.5015988" target="_blank" >http://dx.doi.org/10.1063/1.5015988</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.5015988" target="_blank" >10.1063/1.5015988</a>
Alternative languages
Result language
angličtina
Original language name
Measurement of doping profiles by a contactless method of IR reflectance under grazing incidence
Original language description
The grazing angle infrared reflectance method of the measurement and evaluation of charge carrier profiles in polished wafers was developed. Experimental errors were minimized by division by reference spectra taken on an undoped sample and further by normalization to a fixed value in the region of 4000/cm to 7000/cm. The carrier profile in boron-doped samples was parametrized by 3 parameters and that in phosphorous-doped samples was parametrized by 4 parameters, using additional empirically determined assumptions. As a physical model, the Drude equation is used with two parameters assumed to be concentration-dependent: relaxation time and contribution from band-to-band excitations. The model parameters were calibrated independently by infrared ellipsometry. The presented method gives results in satisfactory agreement with the profiles measured by the electrochemical capacitance-voltage method.
Czech name
—
Czech description
—
Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
20201 - Electrical and electronic engineering
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Review of Scientific Instruments
ISSN
0034-6748
e-ISSN
—
Volume of the periodical
89
Issue of the periodical within the volume
6
Country of publishing house
US - UNITED STATES
Number of pages
6
Pages from-to
—
UT code for WoS article
000437195200014
EID of the result in the Scopus database
2-s2.0-85048681137