Ion formation in an argon and argon-oxygen gas mixture of a magnetron sputtering discharge

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00519384" target="_blank" >RIV/68378271:_____/19:00519384 - isvavai.cz</a>
Alternative codes found
RIV/60076658:12310/19:43900245
Result on the web
<a href="http://hdl.handle.net/11104/0304480" target="_blank" >http://hdl.handle.net/11104/0304480</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1088/2399-6528/ab1e82" target="_blank" >10.1088/2399-6528/ab1e82</a>

Result language
angličtina
Original language name
Ion formation in an argon and argon-oxygen gas mixture of a magnetron sputtering discharge
Original language description
Formation of singly and doubly charged argon and titanium and of molecular ions in a direct current magnetron sputtering discharge with a Ti cathode and argon as working gas was investigated with the help of energy-resolved mass spectrometry. Measured ion energy distributions consist of low-energy and high-energy components resembling different formation processes.
Czech name
—
Czech description
—

Type
J<sub>SC</sub> - Article in a specialist periodical, which is included in the SCOPUS database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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