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Laser induced damage threshold of silicon with native and artificial SiO2 layer

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F19%3A00538876" target="_blank" >RIV/68378271:_____/19:00538876 - isvavai.cz</a>

  • Result on the web

    <a href="http://hdl.handle.net/11104/0316619" target="_blank" >http://hdl.handle.net/11104/0316619</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.17973/MMSJ.2019_12_2019103" target="_blank" >10.17973/MMSJ.2019_12_2019103</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Laser induced damage threshold of silicon with native and artificial SiO2 layer

  • Original language description

    Spot size measurements of a 260 fs, 1030 nm focused spatially Gaussian pulsed laser beam were performed on a Silicon surface with native and thermally grown SiO2 layers using a widely known method of evaluating laser beam energy dependent damage area. Single pulse laser induced damage thresholds of both samples were also measured. Modification of the thermally grown SiO2 layer was analyzed in detail using optical, confocal and scanning electron microscopy. Restrictions in Gaussian beam spot size measurements on the samples with transparent coatings and several observable thresholds are discussed.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    <a href="/en/project/LO1602" target="_blank" >LO1602: HiLASE: Superlasers for Real World</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2019

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    MM Science Journal

  • ISSN

    1803-1269

  • e-ISSN

  • Volume of the periodical

    2019

  • Issue of the periodical within the volume

    Dec

  • Country of publishing house

    CZ - CZECH REPUBLIC

  • Number of pages

    5

  • Pages from-to

    3579-3584

  • UT code for WoS article

    000532572200029

  • EID of the result in the Scopus database

    2-s2.0-85076600420