Laser induced damage treshold of silicon with native and artificial SiO2 layer
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21340%2F19%3A00336200" target="_blank" >RIV/68407700:21340/19:00336200 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.17973/MMSJ.2019_12_2019103" target="_blank" >https://doi.org/10.17973/MMSJ.2019_12_2019103</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.17973/MMSJ.2019_12_2019103" target="_blank" >10.17973/MMSJ.2019_12_2019103</a>
Alternative languages
Result language
angličtina
Original language name
Laser induced damage treshold of silicon with native and artificial SiO2 layer
Original language description
Spot size measurements of a 260 fs, 1030 nm focused spatially Gaussian pulsed laser beam were performed on a Silicon surface with native and thermally grown SiO2 layers using a widely known method of evaluating laser beam energy dependent damage area. Single pulse laser induced damage thresholds of both samples were also measured. Modification of the thermally grown SiO2 layer was analyzed in detail using optical, confocal and scanning electron microscopy. Restrictions in Gaussian beam spot size measurements on the samples with transparent coatings and several observable thresholds are discussed.
Czech name
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Czech description
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Classification
Type
J<sub>SC</sub> - Article in a specialist periodical, which is included in the SCOPUS database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
MM Science Journal
ISSN
1803-1269
e-ISSN
1805-0476
Volume of the periodical
2019
Issue of the periodical within the volume
December
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
6
Pages from-to
3579-3584
UT code for WoS article
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EID of the result in the Scopus database
2-s2.0-85076600420