Room temperature reactive deposition of InGaZnO and ZnSnO amorphous oxide semiconductors for flexible electronics
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00531704" target="_blank" >RIV/68378271:_____/20:00531704 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23640/20:43962441
Result on the web
<a href="http://hdl.handle.net/11104/0310321" target="_blank" >http://hdl.handle.net/11104/0310321</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3390/coatings10010002" target="_blank" >10.3390/coatings10010002</a>
Alternative languages
Result language
angličtina
Original language name
Room temperature reactive deposition of InGaZnO and ZnSnO amorphous oxide semiconductors for flexible electronics
Original language description
We report on magnetron sputtering of amorphous oxide semiconductors, interesting materials combining optical transparency with high electron mobility. Namely, we studied InGaZnO (IGZO) and ZnSnO (ZTO) thin films with a focus on the effect of deposition conditions on the film properties. IGZO films were deposited by radio-frequency (RF) sputtering from an oxide target while for ZTO, reactive sputtering from an alloy target was used. All films were deposited without substrate heating and characterized with respect to microstructure, electron mobility, and resistivity. The best as-deposited IGZO films exhibited an electron mobility of 18 cm2/Vs. The lateral distribution of the electrical properties in such films is mainly related to the activity and amount of oxygen reaching the substrate surface as well as its spatial distribution. The lateral uniformity is strongly influenced by the composition and energy of the material flux towards the substrate.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Coatings
ISSN
2079-6412
e-ISSN
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Volume of the periodical
10
Issue of the periodical within the volume
1
Country of publishing house
CH - SWITZERLAND
Number of pages
7
Pages from-to
1-7
UT code for WoS article
000513694500027
EID of the result in the Scopus database
2-s2.0-85079060260