Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00538978" target="_blank" >RIV/68378271:_____/20:00538978 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1116/6.0000108" target="_blank" >https://doi.org/10.1116/6.0000108</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1116/6.0000108" target="_blank" >10.1116/6.0000108</a>
Alternative languages
Result language
angličtina
Original language name
Explanation of the apparent depth resolution improvement by SIMS using cluster ion detection
Original language description
The apparent improvement of the depth resolution in secondary ion mass spectrometry depth profiles using cluster secondary ions as compared to single ion profiles is explained on basis of an attractive interaction enhancing cluster formation.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN
2166-2746
e-ISSN
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Volume of the periodical
38
Issue of the periodical within the volume
3
Country of publishing house
US - UNITED STATES
Number of pages
7
Pages from-to
1-7
UT code for WoS article
000569104200043
EID of the result in the Scopus database
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