Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00540754" target="_blank" >RIV/68378271:_____/20:00540754 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.3390/proceedings2020056013" target="_blank" >http://dx.doi.org/10.3390/proceedings2020056013</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3390/proceedings2020056013" target="_blank" >10.3390/proceedings2020056013</a>
Alternative languages
Result language
angličtina
Original language name
Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications
Original language description
We present the feasibility to fabricate membranes and cantilevers made of diamond grown on Si/SiO2 substrates by femtosecond laser ablation. In the ablation process, we generated nano‐ and microstructures on the membrane surface. Such laser induced periodic surface structures (LIPSS) are useful in tailoring the surface chemistry. In combination with wet‐ or reactive ion etching smooth membranes were generated.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
<a href="/en/project/8X20035" target="_blank" >8X20035: Advanced Microcantilevers from Wide Bandgap Materials</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems
ISBN
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ISSN
2504-3900
e-ISSN
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Number of pages
3
Pages from-to
1-3
Publisher name
MDPI
Place of publication
Basel
Event location
Online
Event date
Nov 2, 2020
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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