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Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F20%3A00540754" target="_blank" >RIV/68378271:_____/20:00540754 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.3390/proceedings2020056013" target="_blank" >http://dx.doi.org/10.3390/proceedings2020056013</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.3390/proceedings2020056013" target="_blank" >10.3390/proceedings2020056013</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications

  • Original language description

    We present the feasibility to fabricate membranes and cantilevers made of diamond grown on Si/SiO2 substrates by femtosecond laser ablation. In the ablation process, we generated nano‐ and microstructures on the membrane surface. Such laser induced periodic surface structures (LIPSS) are useful in tailoring the surface chemistry. In combination with wet‐ or reactive ion etching smooth membranes were generated.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

  • OECD FORD branch

    10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Result continuities

  • Project

    <a href="/en/project/8X20035" target="_blank" >8X20035: Advanced Microcantilevers from Wide Bandgap Materials</a><br>

  • Continuities

    I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Others

  • Publication year

    2020

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    Proceedings of 4th International Conference nanoFIS 2020 - Functional Integrated nanoSystems

  • ISBN

  • ISSN

    2504-3900

  • e-ISSN

  • Number of pages

    3

  • Pages from-to

    1-3

  • Publisher name

    MDPI

  • Place of publication

    Basel

  • Event location

    Online

  • Event date

    Nov 2, 2020

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article