MICRO STRUCTURING OF BULK SIC SUBSTRATES BY FEMTOSECOND LASER ABLATION
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F16%3A00305331" target="_blank" >RIV/68407700:21230/16:00305331 - isvavai.cz</a>
Result on the web
<a href="http://kf.elf.stuba.sk/~apcom/apcom16/" target="_blank" >http://kf.elf.stuba.sk/~apcom/apcom16/</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
MICRO STRUCTURING OF BULK SIC SUBSTRATES BY FEMTOSECOND LASER ABLATION
Original language description
SiC is a material basis for pressure and strain sensors used in harsh thermal environment conditions. For such sensor devices, piezoelectric III-N compounds, especially gallium nitride (GaN)-related heterostructures on appropriate tailored SiC diaphragms are often used. We demonstrated that diaphragms can be fabricated faster with laser ablation than by reactive ion etching. However, laser ablation frequently causes pinholes in SiC membranes provoking increased risk to damage the III-N heterostructure by the fabrication process. Our experiments confirmed that pinhole defects in the ablated membranes are initiated by ripple structures related to the polarization of the laser. We developed an ablation technique inhibiting the formation of pin holes caused by laser induced periodic surface structures (LIPSS). In addition we tested the hypothesis that LIPSS in SiC act like slot waveguides performing a numerical study of light propagation in LIPSS. The results showed that laser intensity is enhanced inside LIPSS which supports the experimental ablation findings in the formation of pinholes and led us to effective countermeasures.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 22 th International conference on APPLIED PHYSICS OF CONDENSED MATTER
ISBN
978-80-227-4373-0
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
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Publisher name
FEI, Slovak University of Technology
Place of publication
Bratislava
Event location
Strbske Pleso
Event date
Jun 22, 2016
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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