Deposition of cobalt oxide films by reactive pulsed magnetron sputtering
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00541687" target="_blank" >RIV/68378271:_____/21:00541687 - isvavai.cz</a>
Alternative codes found
RIV/61989100:27740/21:10247411
Result on the web
<a href="https://doi.org/10.1016/j.surfcoat.2020.126590" target="_blank" >https://doi.org/10.1016/j.surfcoat.2020.126590</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2020.126590" target="_blank" >10.1016/j.surfcoat.2020.126590</a>
Alternative languages
Result language
angličtina
Original language name
Deposition of cobalt oxide films by reactive pulsed magnetron sputtering
Original language description
Cobalt oxide films were deposited with the help of reactive HiPIMS and mid-frequency pulsed magnetron sputtering (PMS) in argon gas at an argon gas pressure of 1 Pa and with different oxygen admixtures. The intensity of plasma ions, in particular Co+ and O+, is enhanced during HiPIMS compared to PMS and extends to larger ion energies. Films deposited on glass substrates were characterized by scanning electron microscopy, X-ray photoelectron spectroscopy, Raman spectroscopy, and X-ray diffraction. Crystal structure and electrical resistivity of as-deposited films were found to depend on the deposition conditions. Deposited films are compatible with a non-stoichiometric Co3O4 spinel type crystal structure with unoccupied cobalt sites. PMS produces films with a preferred lattice orientation. HiPIMS show large internal stress which relaxes during annealing. Electrical resistivity is several orders of magnitude smaller for films deposited by HiPIMS compared to PMS.
Czech name
—
Czech description
—
Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
—
OECD FORD branch
10305 - Fluids and plasma physics (including surface physics)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
—
Volume of the periodical
405
Issue of the periodical within the volume
Jan
Country of publishing house
CH - SWITZERLAND
Number of pages
11
Pages from-to
126590
UT code for WoS article
000604583200062
EID of the result in the Scopus database
2-s2.0-85096441240