Surface treatment of ZnO microrods by the inductively coupled hydrogen plasma with self-biased holder
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00549951" target="_blank" >RIV/68378271:_____/21:00549951 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Surface treatment of ZnO microrods by the inductively coupled hydrogen plasma with self-biased holder
Original language description
Inductively coupled plasma (ICP) operating at the radio frequency (RF) of 13.56 MHz has been used as a low-pressure treatment method providing further adjustment of surface properties. We elucidate the role of the self-bias of the substrate holder on optical properties of a ZnO surface exposed to hydrogen plasma.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of ADEPT - ADEPT 2021
ISBN
978-80-554-1806-3
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
37-40
Publisher name
University of Žilina
Place of publication
Žilina
Event location
Podbanské
Event date
Sep 20, 2021
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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