Changes of morphological, optical and electrical properties induced by hydrogen plasma on (0001) ZnO surface

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00548925" target="_blank" >RIV/68378271:_____/22:00548925 - isvavai.cz</a>

Alternative codes found

RIV/68407700:21230/22:00352969

Result on the web

<a href="https://doi.org/10.1002/pssa.202100427" target="_blank" >https://doi.org/10.1002/pssa.202100427</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssa.202100427" target="_blank" >10.1002/pssa.202100427</a>

Result language

angličtina

Original language name

Changes of morphological, optical and electrical properties induced by hydrogen plasma on (0001) ZnO surface

Original language description

Plasma provides specific adjustment of solid-state surface properties offering an alternative to high temperature treatment. In this work, hydrogen plasma treatment of monocrystalline (0001) ZnO surface is studied in an inductively coupled plasma (ICP) reactor with reduced capacitively coupled plasma mode. We explain the crucial role of electrical grounding of the sample holder for plasma etching and related changes in the morphology, optical and electrical properties of surfaces exposed to electron and ion bombardment. The effects on the chemical composition of the surface are analyzed by (XPS), optical properties by photoluminescence spectroscopy, topography, roughness and surface potential by atomic force microscopy (AFM) and Kelvin probe force microscopy (KPFM). All methods show altered ZnO surface properties before and after plasma treatment strongly depending on the electrical potential of the holder.

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2022

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Physica Status Solidi A

ISSN

1862-6300

e-ISSN

1862-6319

Volume of the periodical

219

Issue of the periodical within the volume

16

Country of publishing house

DE - GERMANY

Number of pages

7

Pages from-to

2100427

UT code for WoS article

000720624700001

EID of the result in the Scopus database

2-s2.0-85119439391