Effect of pulsed methane gas flow on the incorporation of phosphorous in diamond
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00556046" target="_blank" >RIV/68378271:_____/22:00556046 - isvavai.cz</a>
Alternative codes found
RIV/26722445:_____/22:N0000036 RIV/68407700:21230/22:00356611 RIV/68407700:21460/22:00356611
Result on the web
<a href="https://doi.org/10.1016/j.diamond.2022.108928" target="_blank" >https://doi.org/10.1016/j.diamond.2022.108928</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.diamond.2022.108928" target="_blank" >10.1016/j.diamond.2022.108928</a>
Alternative languages
Result language
angličtina
Original language name
Effect of pulsed methane gas flow on the incorporation of phosphorous in diamond
Original language description
The synthesis of n-type phosphorus-doped diamond is essential for the development of diamond-based bipolar devices. Although demonstrated 20 years ago, it remains a complex problem due to low incorporation efficiency and low maximum concentrations. Previous works showed the deleterious influence of methinophosphide formation in a methane/hydrogen/phosphine plasma on the growth of phosphorous doped diamond using the chemical vapor deposition method. In this work, we investigate the effect of pulsing methane during microwave plasma enhanced chemical vapor deposition to avoid the formation of HCP and to increase phosphorus incorporation efficiency and maximum concentration in diamond.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Diamond and Related Materials
ISSN
0925-9635
e-ISSN
1879-0062
Volume of the periodical
124
Issue of the periodical within the volume
April
Country of publishing house
CH - SWITZERLAND
Number of pages
6
Pages from-to
108928
UT code for WoS article
000790632900003
EID of the result in the Scopus database
2-s2.0-85124897543