Possible approaches for combined use of xenon and gallium ion sources for task specific focused ion beam sample preparation
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F22%3A00566515" target="_blank" >RIV/68378271:_____/22:00566515 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Possible approaches for combined use of xenon and gallium ion sources for task specific focused ion beam sample preparation
Original language description
Gallium (Ga) is the most commonly used liquid metal ion source (LMIS) for commercial focused ion beam (FIB) instruments, and in terms of scanning electron microscopy (SEM), is also the most commonly used ion column in platform instruments called “dual-beams” (FIB-SEM). Although there are a few reasons why it is advantageous to use this type of source, e.g., Ga low melting point, long source life, high angular intensity with a small energy spread, etc., there are also disadvantages, which FIB users should avoid. One of those problems, often present in transmission electron microscopy (TEM) sample preparation (FIB-SEM prepared TEM lamellae), is implantation of Ga ions in the specimen. A few years ago, “dual-beams” with plasma source focused ion beam (PFIB-SEM) were introduced, preferably using noble gas Xenon (Xe) ions. Here, we would like to demonstrate various possible approaches for combined use of these powerful platform instruments.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
<a href="/en/project/LM2018110" target="_blank" >LM2018110: CzechNanoLab research infrastructure</a><br>
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů