Low temperature growth of nanocrystalline diamond: Insight thermal property
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F23%3A00572859" target="_blank" >RIV/68378271:_____/23:00572859 - isvavai.cz</a>
Result on the web
<a href="https://hdl.handle.net/11104/0343429" target="_blank" >https://hdl.handle.net/11104/0343429</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.diamond.2023.110070" target="_blank" >10.1016/j.diamond.2023.110070</a>
Alternative languages
Result language
angličtina
Original language name
Low temperature growth of nanocrystalline diamond: Insight thermal property
Original language description
One of the limitations of materials for high-power devices and structural coatings applications is heat dissipation. Diamond is a suitable material for heat distribution due to its high thermal conductivity. Nevertheless, it is usually grown at high temperature (800–1200 °C), which limits its use as a coating for substrates vulnerable to degradation at high temperatures. In this work, it is studied the effect of the distance between the plasma source and substrate on the growth of nanocrystalline diamond layers on silicon substrates at low temperature (<450 °C) by microwave linear antenna plasma enhanced chemical vapour deposition (MW-LA-PECVD) in pulse mode. The nanocrystalline diamond films have been analysed by scanning electron microscopy (SEM), atomic force microscopy (AFM) and Raman spectroscopy. Finally, the superficial thermal conductivity of the diamond layers was determined by scanning thermal microscopy-AFM (SThM-AFM).
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Diamond and Related Materials
ISSN
0925-9635
e-ISSN
1879-0062
Volume of the periodical
137
Issue of the periodical within the volume
Aug.
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
6
Pages from-to
110070
UT code for WoS article
001022231900001
EID of the result in the Scopus database
2-s2.0-85162032536