Strain sensing on steel surfaces using vacuum packaged MEMS resonators
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21110%2F10%3A00190393" target="_blank" >RIV/68407700:21110/10:00190393 - isvavai.cz</a>
Result on the web
<a href="http://elsevier.com/locate/procedia" target="_blank" >http://elsevier.com/locate/procedia</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.proeng.2010.09.383" target="_blank" >10.1016/j.proeng.2010.09.383</a>
Alternative languages
Result language
angličtina
Original language name
Strain sensing on steel surfaces using vacuum packaged MEMS resonators
Original language description
The paper presents a technology for strain sensing on steel using resonant MEMS packaged in vacuum. For this purpose, a custom sensor fabrication technology and a novel vacuum packaging technique have been developed. The MEMS sensors have been fabricatedby surface micromachining of thick (15 um) Silicon On Insulator substrates with heavily doped handle layers (= 0.005 cm). Using this process, Double-Ended Tuning Fork (DETF) parallel-plate resonators with reduced coupling gaps (less than 1 um) have beenfabricated, using a high-performance Deep Reactive Ion Etching performed on submicrometric submicrometer features realized by near-UV lithography combined with a maskless line narrowing technique. The devices have been bonded to a thin steel bar by epoxy glue, packaged in vacuum and tested by applying strain to the bar, showing good tolerances to packaging parasitics, measurement reversibility, and strain sensitivity of 10 Hz/u?.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JM - Structural engineering
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA103%2F09%2F1600" target="_blank" >GA103/09/1600: Research of the monitoring methods of micro-deformations of underground (metro) structures</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Procedia Engineering
ISSN
1877-7058
e-ISSN
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Volume of the periodical
5
Issue of the periodical within the volume
5
Country of publishing house
NL - THE KINGDOM OF THE NETHERLANDS
Number of pages
4
Pages from-to
1426-1429
UT code for WoS article
000287162400351
EID of the result in the Scopus database
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