Fabrication of periodically ordered diamond nanostructures by microsphere lithography

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21110%2F14%3A00223275" target="_blank" >RIV/68407700:21110/14:00223275 - isvavai.cz</a>

Alternative codes found

RIV/68378271:_____/14:00438716 RIV/68407700:21340/14:00223275

Result on the web

<a href="http://dx.doi.org/10.1002/pssb.201451172" target="_blank" >http://dx.doi.org/10.1002/pssb.201451172</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssb.201451172" target="_blank" >10.1002/pssb.201451172</a>

Result language

angličtina

Original language name

Fabrication of periodically ordered diamond nanostructures by microsphere lithography

Original language description

Structured diamond films are required for several uses as photonic crystals, (bio-) sensors, biomedicine, etc. Often, these uses require fabrication of nano-sized features with the assistance of lithographic techniques. In this paper, we demonstrate thegrowth of diamond structures well ordered in periodic arrays. The technological process starts with ultrasonic seeding of Si substrates by ultra-dispersed detonation diamond nanoparticles. Then, a monolayer of polystyrene microspheres (PS) is deposited on seeded Si substrates by Langmuir-Blodgett method. The primary diameter of PS varies from 253 to 940nm. The self-assembled PS are employed as a mechanical mask for reactive ion etching of the seeding layer via reducing the PS diameter down. The seedingstructures remained under reduced PS were used for growing periodically ordered diamond arrays by microwave plasma-assisted chemical vapor deposition from a hydrogen rich gas mixture. Cross-section SEM images reveal that the diameter and

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

S - Specificky vyzkum na vysokych skolach

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

physica status solidi (b)

ISSN

0370-1972

e-ISSN

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Volume of the periodical

251

Issue of the periodical within the volume

12

Country of publishing house

DE - GERMANY

Number of pages

6

Pages from-to

2587-2592

UT code for WoS article

000345830900044

EID of the result in the Scopus database

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