Structuring of diamond films using microsphere lithography

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21110%2F14%3A00223276" target="_blank" >RIV/68407700:21110/14:00223276 - isvavai.cz</a>

Alternative codes found

RIV/68378271:_____/14:00440224 RIV/68407700:21340/14:00223276

Result on the web

<a href="https://ojs.cvut.cz/ojs/index.php/ap/article/view/AP.2014.54.0320/2175" target="_blank" >https://ojs.cvut.cz/ojs/index.php/ap/article/view/AP.2014.54.0320/2175</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.14311/AP.2014.54.0320" target="_blank" >10.14311/AP.2014.54.0320</a>

Result language

angličtina

Original language name

Structuring of diamond films using microsphere lithography

Original language description

In this study, the structuring of micro-and nanocrystalline diamond thin films is demonstrated. The diamond films are structured using the technique of microsphere lithography followed by reactive ion etching. Specifically, this paper presents a four-step fabrication process: diamond deposition (microwave plasma assisted chemical vapor deposition), mask preparation (by the standard Langmuir-Blodgett method), mask modification and diamond etching. A self-assembled monolayer of monodisperse polystyrene (PS) microspheres with close-packed ordering is used as the primary template. Then the PS microspheres and the diamond films are processed in capacitively coupled radiofrequency plasma using various plasma chemistries. This fabrication method illustrates the preparation of large arrays of periodic and homogeneous hillock-like structures. The surface morphology of the processed diamond films is characterized by scanning electron microscopy and with the use of an atomic force microscope. The

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

BM - Solid-state physics and magnetism

OECD FORD branch

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Project

<a href="/en/project/GBP108%2F12%2FG108" target="_blank" >GBP108/12/G108: Preparation, modification and characterization of materials by radiation</a><br>

Continuities

S - Specificky vyzkum na vysokych skolach

Publication year

2014

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Acta Polytechnica

ISSN

1210-2709

e-ISSN

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Volume of the periodical

54

Issue of the periodical within the volume

5

Country of publishing house

CZ - CZECH REPUBLIC

Number of pages

5

Pages from-to

320-324

UT code for WoS article

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EID of the result in the Scopus database

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