Comparison of micro and macro scratch testing methods for adhesion and microhardness determination of thin films

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21220%2F11%3A00185457" target="_blank" >RIV/68407700:21220/11:00185457 - isvavai.cz</a>
Alternative codes found
RIV/68407700:21460/11:00185457
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Comparison of micro and macro scratch testing methods for adhesion and microhardness determination of thin films
Original language description
In this work, we focused on the usability of scratch test technique for determination of thin films adhesion with the layer thicknesses around one hundred nanometres and less. For this study we prepared titanium dioxide and diamond-like-carbon thin filmsdeposited by Pulsed Laser Deposition technique. We tested microhardness and friction behaviour on the same samples. We tested adhesion properties by micro and macro scratch tests techniques on three different measurement instruments. We used macroscratch tester Revetest (CSM corp.), nanosclerometric extending atomic force microscope (AFM) head Solver Next (NT-MTD corp.), and Hysitron TI950 with nanoscratch transducer. We observed and compared abilities for the each individual instrument to evaluate adhesion of thin films with thickness of several tenths of nanometres. We were looking for advantages and disadvantages of these systems and methods.
Czech name
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Czech description
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Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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