Miniature Silicon Transducer with a Non-planar Back Plate

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F03%3A03086205" target="_blank" >RIV/68407700:21230/03:03086205 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Miniature Silicon Transducer with a Non-planar Back Plate

Original language description

The electroacoustic electrostatic transducer as a sensor is usually formed by a thin circular or, in the case of silicon sensors, square membrane or plate and a planar back electrode with holes. The diaphragm displacement distribution of a thin circularmembrane in fundamental symmetrical mode (and below it) is approximately parabolic and only the central area of the diaphragm produces the main contribution to the capacitance changes. For this reason it is possible to make the back plate shape also, forexample parabolic (paraboloid of nth order), simultaneously preserve the sensitivity of the transducer and modify the acoustical impedance of the air-gap and thus the damping of the diaphragm.

Czech name

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Czech description

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Type

D - Article in proceedings

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

<a href="/en/project/GA102%2F00%2F1661" target="_blank" >GA102/00/1661: Electroacoustic transducers with electrical field</a><br>

Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2003

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

Proceedings of Workshop 2003

ISBN

80-01-02708-2

ISSN

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e-ISSN

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Number of pages

2

Pages from-to

422-423

Publisher name

ČVUT

Place of publication

Praha

Event location

Praha

Event date

Feb 10, 2003

Type of event by nationality

EUR - Evropská akce

UT code for WoS article

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