Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F07%3A03137126" target="_blank" >RIV/68407700:21230/07:03137126 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors
Original language description
This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors generally work in high temperature mode that is required for chemical reactions to beperformed between molecules of the specified gas and the surface of sensing material. There is a low power consumption required to obtain the operation temperatures in the range of 200 to 500 oC.
Czech name
Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors
Czech description
This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors generally work in high temperature mode that is required for chemical reactions to beperformed between molecules of the specified gas and the surface of sensing material. There is a low power consumption required to obtain the operation temperatures in the range of 200 to 500 oC.
Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
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Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
DTIP 2007
ISBN
978-2-35500-000-3
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
147-150
Publisher name
TIMA
Place of publication
Grenoble
Event location
Stresa
Event date
Apr 25, 2007
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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