Micromechanical GaAs Hot Plates for Gas Sensors

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F07%3A03137182" target="_blank" >RIV/68407700:21230/07:03137182 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Micromechanical GaAs Hot Plates for Gas Sensors

Original language description

This paper discusses the design, simulation and fabrication of new Micromachined Thermal Hot Plates (MTHPs) based on GaAs, which were designed for Gas sensors. High sensitivity and low power are expected for present metal oxide Gas sensors, which generally work in high temperature mode (which is essential for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material). Because low power consumption is required, even for operation temperatures in the range of 200 to 500 oC, high thermal isolation of these devices are necessary.

Czech name

GaAs mikromechanická tepelná struktura pro senzory plynů

Czech description

This paper discusses the design, simulation and fabrication of new Micromachined Thermal

Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

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Continuities

Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Sensors and Transducers

ISSN

1726-5479

e-ISSN

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Volume of the periodical

2007

Issue of the periodical within the volume

10

Country of publishing house

ES - SPAIN

Number of pages

9

Pages from-to

84-92

UT code for WoS article

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EID of the result in the Scopus database

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