GaAs based micromachined thermal converter for gas sensors

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F08%3A03147715" target="_blank" >RIV/68407700:21230/08:03147715 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
GaAs based micromachined thermal converter for gas sensors
Original language description
The micromachining technology and an electro-thermo-mechanical performance analysis of GaAs based micromachined thermal converter (MTC) device to be designed for metal oxide gas sensors are presented. MTC device introduced exhibits a low power consumption due to by high thermal resistance values (Rth = 15-21 K/mW), uniform temperature distribution, a fast temperature time response (? 1.5-1.8 ms), and good mechanical integrity and thermal stability. It is also fully compatible with the GaAs HEMT based signal-processing and controlling electronics to be monolithically integrated with the gas sensors. The both a simple analytical and three-dimensional thermal modeling of the MTC device was performed. It supported the high electro-thermal conversion efficiency and fast temperature time response of the MEMS device as evaluated by the experiments.
Czech name
GaAs mikromechanický tepelný převodník pro senzory plynů
Czech description
GaAs mikromechanický tepelný převodník pro senzory plynů

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Project
<a href="/en/project/GA102%2F06%2F1624" target="_blank" >GA102/06/1624: Micro and nano sensor structures and systems with embedded intelligence (MINASES)</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2008
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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