Micromechanical GaAs Thermal Convertor for Gas Sensors
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F07%3A03137145" target="_blank" >RIV/68407700:21230/07:03137145 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Micromechanical GaAs Thermal Convertor for Gas Sensors
Original language description
This paper discusses design, simulation and fabrication of new Micromechanical Thermal Converters (MTCs) based on GaAs developed for Gas sensors. GaAs MTCs seem to be very attractive for design of thermally based MEMS sensor devices. High thermal isolation of these devices can be done by implementing of free micromechanical hot plates which is designed as thin as possible.
Czech name
Micromechanical GaAs Thermal Convertor for Gas Sensors
Czech description
This paper discusses design, simulation and fabrication of new Micromechanical Thermal Converters (MTCs) based on GaAs developed for Gas sensors. GaAs MTCs seem to be very attractive for design of thermally based MEMS sensor devices. High thermal isolation of these devices can be done by implementing of free micromechanical hot plates which is designed as thin as possible.
Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA102%2F06%2F1624" target="_blank" >GA102/06/1624: Micro and nano sensor structures and systems with embedded intelligence (MINASES)</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Technical Proceedings of the Nanotech 2007
ISBN
1-4200-6349-9
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
244-247
Publisher name
Nano Science and Technology Institute
Place of publication
Boston
Event location
Santa Clara, CA
Event date
May 20, 2007
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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