Suspended Island MEMS Structure for High Temperature Gas Sensor
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F08%3A03147717" target="_blank" >RIV/68407700:21230/08:03147717 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Suspended Island MEMS Structure for High Temperature Gas Sensor
Original language description
simulation and fabrication of new GaN and GaAs Micromechanical Thermal Converters (MTCs) developed for Gas sensors. GaAs and GaN MTCs seem to be very attractive for design of thermally based MEMS sensor devices. To achieve low power consumption in the sensor operation range of 200 to 500 oC we need to ensure high thermal isolation of sensing layers.
Czech name
Zavěšená MEMS struktura pro vysokoteplotní senzor plynů
Czech description
Zavěšená MEMS struktura pro vysokoteplotní senzor plynů
Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA102%2F06%2F1624" target="_blank" >GA102/06/1624: Micro and nano sensor structures and systems with embedded intelligence (MINASES)</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2008
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Electronics Devices and Systems Proceedings
ISBN
978-80-214-3717-3
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
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Publisher name
Vysoké učení technické v Brně
Place of publication
Brno
Event location
Brno
Event date
Sep 10, 2008
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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