Micromechanical Thermal Converter for Microwave Power Sensor
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F06%3A00151363" target="_blank" >RIV/68407700:21230/06:00151363 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Micromechanical Thermal Converter for Microwave Power Sensor
Original language description
The prototype is design and fabrication of Thermal Convertor for Microwave Power Sensor microsystem. Main criteria are keeping the thermal stress as low as possible. The concept of the absorbed power measurement is based on a thermal conversion, where the dissipated or absorbed RF power is converted into the thermal power, inside a thermally isolated system, so called the Micromechanical Thermal Converter (MTC) device. A new MTC approach uses a GaAs with an active HEMT heater. New technology of low stress Polyimide has been used for MTC thermal isolation within cooperation with Slovak academy of Science.
Czech name
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Czech description
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Classification
Type
G<sub>funk</sub> - Functional sample
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA102%2F06%2F1624" target="_blank" >GA102/06/1624: Micro and nano sensor structures and systems with embedded intelligence (MINASES)</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Internal product ID
Micromechanical Thermal Converte
Numerical identification
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Technical parameters
SAV Bratislava, IČ: 00398136, dohoda o využití v rámci společného řešeného projektu NATO SpF 974172 byla uzavřena dne 5.1.2001
Economical parameters
neuvedeno
Application category by cost
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Owner IČO
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Owner name
Slovak Academy of Sciences, Institute of Electrical Engineering
Owner country
SK - SLOVAKIA
Usage type
A - K využití výsledku jiným subjektem je vždy nutné nabytí licence
Licence fee requirement
Z - Poskytovatel licence na výsledek nepožaduje v některých případech licenční poplatek
Web page
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