Design and Fabrication of High-Temperature SOI Strain-Gauges
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F08%3A03147706" target="_blank" >RIV/68407700:21230/08:03147706 - isvavai.cz</a>
Alternative codes found
RIV/00216224:14310/08:00038454
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Design and Fabrication of High-Temperature SOI Strain-Gauges
Original language description
The following paper introduces the CoventorWare design environment for SOI based piezoresistive sensor design. Fabrication process and characterization of designed sensors is also presented. The software package CoventorWare has been used for design of mechanical and electrical characteristics of the structure. The tools enable design, modelling and successive modification of designed MEMS structures.
Czech name
Návrh a výroba SOI tenzometrů pro vysokoteplotní aplikace
Czech description
Článek se zabývá návrhem SOI tenzometrů s použitím softwarového balíku Coventorware. Technologický proces výroby SOI tenzometrů a jejich charakterizace je popisována také.
Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
—
Result continuities
Project
—
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2008
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
ASDAM 2008 Conference Proceedings
ISBN
978-1-4244-2325-5
ISSN
—
e-ISSN
—
Number of pages
4
Pages from-to
—
Publisher name
Slovak University of Technology
Place of publication
Bratislava
Event location
Smolenice
Event date
Oct 12, 2008
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
—