Electrostatic Transducer with Square Membrane and Non-Planar Back Plate: Simplified Model

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F09%3A00168515" target="_blank" >RIV/68407700:21230/09:00168515 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.3813/AAA.918218" target="_blank" >http://dx.doi.org/10.3813/AAA.918218</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.3813/AAA.918218" target="_blank" >10.3813/AAA.918218</a>

Result language
angličtina
Original language name
Electrostatic Transducer with Square Membrane and Non-Planar Back Plate: Simplified Model
Original language description
This paper aims at providing generalized lumped-element circuits for the modelling of electrostatic microphones with non planar smooth backing electrode. These transducers consist of a circular membrane (or square membrane when fabricated using etching processes), a backing, non planar electrode without holes, both being separated by a thin fluid-gap, the fluid being enclosed in a peripheral reservoir beyond this fluid-gap. The modelling is a generalisation of the classical models: it includes a generalized mechanical impedance of the membrane, and an adapted approach to derive separately both a generalized reactance and a generalized resistance due respectively to the compressibility and the viscosity of the fluid-gap (beyond the inertia). Finally, theoretical results on the sensitivity of miniaturised microphones as a function of the frequency are provided and discussed.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BI - Acoustics and oscillation
OECD FORD branch
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Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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