A hybrid approach to model and simulate the double-gimbaled MEMS-based micromirror

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F10%3A00192018" target="_blank" >RIV/68407700:21230/10:00192018 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
A hybrid approach to model and simulate the double-gimbaled MEMS-based micromirror
Original language description
In this paper, the hybrid approach to model and simulate the behavior of the double-gimbaled MEMS-based micrommiror is presented. The model of the micromirror is represented as a system of coupled equations and combines both the distributed and lumped parameter description. The advantage of the hybrid approach is improved accuracy of simulation results in comparison with the results obtained from pure lumped parameter models, and on other hand, the enormous reduction in simulation time in comparison with the models completely based on the distributed parameter description. The model involves electrostatics, solid mechanics and gas dynamics. Thus, the multiphysics interactions have to be considered and therefore they are discussed in the paper. The gas-damping is modeled by the finite element analysis (via squeeze-film damping effect), and thus, there is no need for the derivation of the analytical formula of the gas-damping.
Czech name
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Czech description
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Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the 7th EUROSIM Congress on Modelling and Simulation, Vol. 2: Full Papers
ISBN
978-80-01-04589-3
ISSN
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e-ISSN
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Number of pages
7
Pages from-to
514-520
Publisher name
Department of Computer Science and Engineering, FEE, CTU in Prague
Place of publication
Prague
Event location
Praha
Event date
Sep 6, 2010
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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