Gas-damped double-gimbaled electrostatic torsional micromirror modeling and simulation

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F12%3A00191002" target="_blank" >RIV/68407700:21230/12:00191002 - isvavai.cz</a>
Result on the web
<a href="http://www.sciencedirect.com/science/article/pii/S1569190X11001444" target="_blank" >http://www.sciencedirect.com/science/article/pii/S1569190X11001444</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.simpat.2011.08.010" target="_blank" >10.1016/j.simpat.2011.08.010</a>

Result language
angličtina
Original language name
Gas-damped double-gimbaled electrostatic torsional micromirror modeling and simulation
Original language description
In this paper, the modeling and simulation of the gas-damped double-gimbaled electrostatic torsional micromirror are presented. The model is represented as a system of coupled equations, and combines both the distributed and lumped parameter description.It involves electrostatics, solid mechanics and gas dynamics.The bending effect of the micromirror suspensions is also considered. Based on the model, the micromirror behavior has been simulated and the simulation results are presented. The model is applicable for wide class of electrostatic MEMS actuators. Moreover, the great advantage of the presented model is enormous reduction in computational time in comparison with the model completely based on the finite element analysis.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Project
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Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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