Design and Fabrication of Piezoelectric Generator with Thin ZNO Layer

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F12%3A00198314" target="_blank" >RIV/68407700:21230/12:00198314 - isvavai.cz</a>
Result on the web
<a href="http://www.imaps.cz/eds/" target="_blank" >http://www.imaps.cz/eds/</a>
DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Design and Fabrication of Piezoelectric Generator with Thin ZNO Layer
Original language description
The paper presents design methodology and fabrication process of piezoelectric generator with thin-film Zinc Oxide (ZnO) layer. The design methodology utilizing FEM simulations is presented. Modeling and simulation of mechanical stresses, resonant frequencies, vibration modes and magnitude of generated voltage is virtually essential for any design of MEMS energy harvesting structures. CoventorWare software package was used as a very strong tool in the structure design. Simulation results opens the possibility for optimization of shape and position of the piezoelectric elements on the deformation transducer to achieve the maximum sensitivity and performance.
Czech name
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Czech description
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Project
<a href="/en/project/GA102%2F09%2F1601" target="_blank" >GA102/09/1601: Intelligent micro and nano structures for microsensors realized with support of nanotechnology</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of Electronic Devices and Systems EDS 2012
ISBN
978-80-214-4539-0
ISSN
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e-ISSN
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Number of pages
5
Pages from-to
167-171
Publisher name
VUT v Brně, FEKT
Place of publication
Brno
Event location
Brno
Event date
Jun 28, 2012
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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