Optimization of Position of Piezoresistive Elements on Substrate Using FEM Simulations

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F10%3A00171676" target="_blank" >RIV/68407700:21230/10:00171676 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Optimization of Position of Piezoresistive Elements on Substrate Using FEM Simulations
Original language description
Models and simulation results presented in the following sections were created in MEMS simulator CoventorWare. The simulator enables drawing of layout of designed structures, creation of 3d models and mesh generation for FEM and analyzing in different domains, such as mechanical, piezoresistive, electrostatic, piezoelectric, thermal etc. The mechanical solver, in CoventorWare called MemMech, computes the displacement and stresses in the structure. The user applies the boundary conditions, e.g. one of the beam end is fixed, while the opposite is loaded by uniaxial force and others.
Czech name
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Czech description
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Project
<a href="/en/project/GA102%2F09%2F1601" target="_blank" >GA102/09/1601: Intelligent micro and nano structures for microsensors realized with support of nanotechnology</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Conference Proceedings of the Eighth International Conference on Advanced Semiconductor Devices and Microsystems
ISBN
978-1-4244-8572-7
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
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Publisher name
IEEE
Place of publication
Bratislava
Event location
Smolenice
Event date
Oct 24, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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